Surface figure metrology based on geometric phase components

K. N. Joo, H. M. Park, H. B. Jeong, C. E. Guthery, D. Kim, Y. S. Ghim

Research output: Chapter in Book/Report/Conference proceedingConference contribution


A geometric phase component is very attractive in optical metrology because its meta-surface characteristic enables traditional optical systems to be more compact and multi-functional. In this presentation, we introduce two types of geometric phase components, i.e. a geometric phase lens and a polarization grating in surface figure metrology. Their features of polarized beam splitting and phase retardation play a role of wavefront shearing device, and simple shearing interferometers can be designed. We focus on the instrumentation of a radial shearing interferometer using a geometric phase lens and a lateral shearing interferometer based on a polarization grating. With the aid of a polarization pixelated CMOS camera, each interferometer can provide the phase map corresponding to the sheared wavefront as a snapshot measurement. In the experiment, various wavefronts generated by a deformable mirror and shapes of several mirrors were measured and compared with other commercial devices.

Original languageEnglish (US)
Title of host publicationOptics and Photonics for Advanced Dimensional Metrology II
EditorsPeter J. de Groot, Richard K. Leach, Pascal Picart
ISBN (Electronic)9781510651500
StatePublished - 2022
EventOptics and Photonics for Advanced Dimensional Metrology II 2022 - Virtual, Online
Duration: May 9 2022May 20 2022

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceOptics and Photonics for Advanced Dimensional Metrology II 2022
CityVirtual, Online


  • Geometric phase
  • lateral shearing interferometer
  • radial shearing interferometer
  • surface figure
  • wavefront

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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