Surface figure measurements using geometric phase shearing interferometer

Hyo Mi Park, Daewook Kim, Ki Nam Joo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this investigation, we propose a simple radial shearing interferometer using geometric phase lenses. We focus on the analytic approach for surface figure measurements based on the shearing interferometry using the properties of GPLs, and the system instrumentation and characterization with theoretical and experimental concerns. The proposed interferometer in this investigation consists of GPLs to generate two radially-sheared wavefronts and a polarization pixelated camera to simultaneously obtain four phase-shifted interferograms from a single image. In the experiments, the measured results were compared with those of a conventional method, and the proposed interferometer was experimentally verified.

Original languageEnglish (US)
Title of host publicationEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022
EditorsRichard K. Leach, A. Akrofi-Ayesu, C. Nisbet, Dishi Phillips
Publishereuspen
Pages397-398
Number of pages2
ISBN (Electronic)9781998999118
StatePublished - 2022
Event22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022 - Geneva, Switzerland
Duration: May 30 2022Jun 3 2022

Publication series

NameEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022

Conference

Conference22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022
Country/TerritorySwitzerland
CityGeneva
Period5/30/226/3/22

Keywords

  • geometric phase lens
  • radial shearing interferometer
  • wavefront reconstruction
  • wavefront sensing

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Environmental Engineering
  • General Materials Science
  • Instrumentation

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