@inproceedings{a0bcd139974d439998af0fa17752fec1,
title = "Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid",
keywords = "Etching, Gallium arsenide, Hydrochloric acid, Hydrogen peroxide, Indium arsenide, Tartaric acid, Temperature programmed desorption, X-ray photoelectron spectroscopy",
author = "Pablo Mancheno-Posso and Muscat, {Anthony J.}",
year = "2015",
doi = "10.4028/www.scientific.net/SSP.219.52",
language = "English (US)",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "52--55",
editor = "Mertens, {Paul W.} and Marc Meuris and Marc Heyns and Marc Meuris and Marc Heyns",
booktitle = "Ultra Clean Processing of Semiconductor Surfaces XII",
note = "12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014 ; Conference date: 21-09-2014 Through 24-09-2014",
}