Abstract
We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a T c onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.
Original language | English (US) |
---|---|
Pages (from-to) | 2164-2166 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 51 |
Issue number | 25 |
DOIs | |
State | Published - 1987 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)