Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x

J. L. Makous, L. Maritato, Charles M. Falco, J. P. Cronin, G. P. Rajendran, E. V. Uhlmann, D. R. Uhlmann

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a T c onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.

Original languageEnglish (US)
Pages (from-to)2164-2166
Number of pages3
JournalApplied Physics Letters
Issue number25
StatePublished - 1987

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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