Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x

J. L. Makous; L. Maritato; Charles M. Falco; J. P. Cronin; G. P. Rajendran; E. V. Uhlmann; D. R. Uhlmann

doi:10.1063/1.98929

Superconducting and structural properties of sputtered thin films of YBa₂Cu₃O_7-x

J. L. Makous, L. Maritato, Charles M. Falco, J. P. Cronin, G. P. Rajendran, E. V. Uhlmann, D. R. Uhlmann

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We have fabricated thin films of YBa₂Cu₃O_x by dc triode sputtering from two metallic targets. Post-annealing in pure O₂ after sputtering resulted in superconducting films with a T _c onset as high as 89 K and a midpoint T_c of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO₂ on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.

Original language	English (US)
Pages (from-to)	2164-2166
Number of pages	3
Journal	Applied Physics Letters
Volume	51
Issue number	25
DOIs	https://doi.org/10.1063/1.98929
State	Published - 1987

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x",

abstract = "We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a T c onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.",

author = "Makous, {J. L.} and L. Maritato and Falco, {Charles M.} and Cronin, {J. P.} and Rajendran, {G. P.} and Uhlmann, {E. V.} and Uhlmann, {D. R.}",

year = "1987",

doi = "10.1063/1.98929",

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T1 - Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x

AU - Makous, J. L.

AU - Maritato, L.

AU - Falco, Charles M.

AU - Cronin, J. P.

AU - Rajendran, G. P.

AU - Uhlmann, E. V.

AU - Uhlmann, D. R.

PY - 1987

Y1 - 1987

N2 - We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a T c onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.

AB - We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a T c onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 25

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Superconducting and structural properties of sputtered thin films of YBa₂Cu₃O_7-x

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