Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

Tom D. Milster, Farhad Akhavan, Melissa Bailey, J. Kevin Erwin, David M. Felix, Kusato Hirota, Steven Koester, Kei Shimura, Yan Zhang

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


A solid immersion lens is combined with various aperture shapes in order to improve resolution. Both metallic and dielectric apertures are investigated, and optimum shapes for each are determined. Fabrication techniques for each type of combination probe are discussed and implemented, and a simple experiment with a dielectric combination probe scanning a reflective grating demonstrates improved resolution compared to a solid immersion lens alone.

Original languageEnglish (US)
Pages (from-to)1778-1782
Number of pages5
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number3 B
StatePublished - 2001


  • Near-field optics
  • Optical data storage
  • Solid immersion lens
  • Super resolution

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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