Abstract
Subaperture stitching is an economical way to extend small-region, high-resolution interferometric metrology to cover large-aperture optics. Starting from system geometry and measurement noise knowledge, this work derives an analytical expression for how noise in an annular ring of subapertures leads to large-scale errors in the computed stitched surface. These errors scale as sin (πp/M)-2 where p is the number of sine periods around the annular full-aperture and M is the number of subaperture measurements. Understanding how low-spatial-frequency surface errors arise from subaperture noise is necessary for tolerancing systems which use subaperture stitching.
Original language | English (US) |
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Pages (from-to) | 8080-8086 |
Number of pages | 7 |
Journal | Applied optics |
Volume | 54 |
Issue number | 27 |
DOIs | |
State | Published - Sep 20 2015 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering