Subaperture stitching surface errors due to noise

Gregory A Smith, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Subaperture stitching is a popular method for extending small, subaperture interferometer measurements to cover largeaperture optics. The method is simple in that there are only two steps: 1) make multiple measurements across the surface and 2) use well-established software techniques to merge the individual measurements into one surface estimate. Because parts of the system must move between measurements, small misalignments between subapertures are unavoidable, but easily accommodated within the software. Unfortunately this process has the potential to introduce errors. In this work, we show how random noise in a circular ring of subapertures creates artifacts in low-order surface shape estimates. The magnitude of these errors depends on setup parameters such as the number of subapertures and their overlap, as well as the measurement noise within a single subaperture. Understanding the relationships between subaperture stitching configuration and surface artifacts is important when designing high-accuracy metrology systems which rely on subaperture stitching. This work will help metrology system designers incorporate subaperture stitching into error budgets and tolerances.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing XI
EditorsRay Williamson, Oliver W. Fahnle, Dae Wook Kim
ISBN (Electronic)9781628417418
StatePublished - 2015
EventOptical Manufacturing and Testing XI - San Diego, United States
Duration: Aug 9 2015Aug 11 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherOptical Manufacturing and Testing XI
Country/TerritoryUnited States
CitySan Diego


  • Metrology
  • computational processing
  • interferometry
  • model
  • noise
  • stitching
  • theory

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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