Sub-Nyquist interferometry: Implementation and measurement capability

John E. Greivenkamp; Andrew E. Lowman; Russell J. Palum

doi:10.1117/1.600991

Sub-Nyquist interferometry: Implementation and measurement capability

John E. Greivenkamp, Andrew E. Lowman, Russell J. Palum

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

Sub-Nyquist interferometry (SNI) provides a method for measuring wavefronts with large departures from a reference sphere, such as those encountered when testing steep aspheric surfaces. SNI allows wavefronts with several hundred waves of departure to be recorded and analyzed. The theory of SNI is reviewed, its experimental implementation described, and limitations in the hardware and potential improvements are discussed. The importance of calibrating the interferometer for non-null testing is demonstrated.

Original language	English (US)
Article number	09016
Pages (from-to)	2962-2969
Number of pages	8
Journal	Optical Engineering
Volume	35
Issue number	10
DOIs	https://doi.org/10.1117/1.600991
State	Published - Oct 1996

Keywords

Aspheres
Interferometry
Metrology
Optical testing
Phase-shifting interferometry

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Engineering

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10.1117/1.600991

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@article{d2a7e38c8d8c48ac9c51d1d983a27d50,

title = "Sub-Nyquist interferometry: Implementation and measurement capability",

abstract = "Sub-Nyquist interferometry (SNI) provides a method for measuring wavefronts with large departures from a reference sphere, such as those encountered when testing steep aspheric surfaces. SNI allows wavefronts with several hundred waves of departure to be recorded and analyzed. The theory of SNI is reviewed, its experimental implementation described, and limitations in the hardware and potential improvements are discussed. The importance of calibrating the interferometer for non-null testing is demonstrated.",

keywords = "Aspheres, Interferometry, Metrology, Optical testing, Phase-shifting interferometry",

author = "Greivenkamp, {John E.} and Lowman, {Andrew E.} and Palum, {Russell J.}",

year = "1996",

month = oct,

doi = "10.1117/1.600991",

language = "English (US)",

volume = "35",

pages = "2962--2969",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

number = "10",

}

TY - JOUR

T1 - Sub-Nyquist interferometry

T2 - Implementation and measurement capability

AU - Greivenkamp, John E.

AU - Lowman, Andrew E.

AU - Palum, Russell J.

PY - 1996/10

Y1 - 1996/10

N2 - Sub-Nyquist interferometry (SNI) provides a method for measuring wavefronts with large departures from a reference sphere, such as those encountered when testing steep aspheric surfaces. SNI allows wavefronts with several hundred waves of departure to be recorded and analyzed. The theory of SNI is reviewed, its experimental implementation described, and limitations in the hardware and potential improvements are discussed. The importance of calibrating the interferometer for non-null testing is demonstrated.

AB - Sub-Nyquist interferometry (SNI) provides a method for measuring wavefronts with large departures from a reference sphere, such as those encountered when testing steep aspheric surfaces. SNI allows wavefronts with several hundred waves of departure to be recorded and analyzed. The theory of SNI is reviewed, its experimental implementation described, and limitations in the hardware and potential improvements are discussed. The importance of calibrating the interferometer for non-null testing is demonstrated.

KW - Aspheres

KW - Interferometry

KW - Metrology

KW - Optical testing

KW - Phase-shifting interferometry

UR - http://www.scopus.com/inward/record.url?scp=0001517360&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001517360&partnerID=8YFLogxK

U2 - 10.1117/1.600991

DO - 10.1117/1.600991

M3 - Article

AN - SCOPUS:0001517360

SN - 0091-3286

VL - 35

SP - 2962

EP - 2969

JO - Optical Engineering

JF - Optical Engineering

IS - 10

M1 - 09016

ER -

Sub-Nyquist interferometry: Implementation and measurement capability

Abstract

Keywords

ASJC Scopus subject areas

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