@inproceedings{8b4bb70634aa46f4997d960d05d07edd,
title = "Study of the instrument transfer function of a free-form optics metrology system: SCOTS",
abstract = "Instrument transfer function (ITF) of an imaging based metrology system is usually closely related to its imaging transfer function. The Software Configurable Optical Test System (SCOTS), a highly accurate aspheric and freeform surface metrology, is an imaging deflectometry system consisting of a camera and a display screen. We demonstrate that its ITF follows the camera imaging MTF through numerical simulations, considering a diffraction limited camera. We then applied this result to the edge measurement data of a large mirror. A better agreement is achieved between SCOTS test and a test-plate interferometric test after the compensation. This suggests that more attention should be paid to the image quality of the SCOTS for high accuracy measurement.",
keywords = "Fringe reflection, Optical metrology, deflectometry, free-form surfaces, instrument transfer function",
author = "Tianquan Su and Alejandro Maldonado and Peng Su and Ping Zhou and Burge, {James H.}",
year = "2013",
doi = "10.1117/12.2037040",
language = "English (US)",
isbn = "9780819499646",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "2013 International Conference on Optical Instruments and Technology",
note = "2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems ; Conference date: 17-11-2013 Through 19-11-2013",
}