Study of low-K film repair and pore sealing using chlorosilanes dissolved in supercritical carbon dioxide

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	2007 AIChE Annual Meeting
State	Published - 2007
Externally published	Yes
Event	2007 AIChE Annual Meeting - Salt Lake City, UT, United States Duration: Nov 4 2007 → Nov 9 2007

Name	AIChE Annual Meeting, Conference Proceedings

ASJC Scopus subject areas

@inproceedings{9852024deac643cc81551b258c7fe6f3,

title = "Study of low-K film repair and pore sealing using chlorosilanes dissolved in supercritical carbon dioxide",

author = "Eduardo Vyhmeister and Lischen Choate and David Suleiman and Est{\'e}vez, \{L. Antonio\} and Anthony Muscat",

year = "2007",

language = "English (US)",

isbn = "9780816910229",

series = "AIChE Annual Meeting, Conference Proceedings",

booktitle = "2007 AIChE Annual Meeting",

note = "2007 AIChE Annual Meeting ; Conference date: 04-11-2007 Through 09-11-2007",

}

TY - GEN

T1 - Study of low-K film repair and pore sealing using chlorosilanes dissolved in supercritical carbon dioxide

AU - Vyhmeister, Eduardo

AU - Choate, Lischen

AU - Suleiman, David

AU - Estévez, L. Antonio

AU - Muscat, Anthony

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/80053656028

UR - https://www.scopus.com/pages/publications/80053656028#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:80053656028

SN - 9780816910229

T3 - AIChE Annual Meeting, Conference Proceedings

BT - 2007 AIChE Annual Meeting

T2 - 2007 AIChE Annual Meeting

Y2 - 4 November 2007 through 9 November 2007

ER -