Study of low-K film repair and pore sealing using chlorosilanes dissolved in supercritical carbon dioxide

Eduardo Vyhmeister, Lischen Choate, David Suleiman, L. Antonio Estévez, Anthony Muscat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication2007 AIChE Annual Meeting
StatePublished - 2007
Event2007 AIChE Annual Meeting - Salt Lake City, UT, United States
Duration: Nov 4 2007Nov 9 2007

Publication series

NameAIChE Annual Meeting, Conference Proceedings

Other

Other2007 AIChE Annual Meeting
Country/TerritoryUnited States
CitySalt Lake City, UT
Period11/4/0711/9/07

ASJC Scopus subject areas

  • General Chemical Engineering
  • General Chemistry

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