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Study of Low-k Film Functionalization and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide
Eduardo Vyhmeister, Lorenzo Reyes-Bozo, Roman Rodríguez-Maecker, Anthony Muscat, David Suleiman, L. Antonio Estévez
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations