Study of Low-k Film Functionalization and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide

  • Eduardo Vyhmeister
  • , Lorenzo Reyes-Bozo
  • , Roman Rodríguez-Maecker
  • , Anthony Muscat
  • , David Suleiman
  • , L. Antonio Estévez

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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Engineering

Chemical Engineering

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Material Science