Study of interaction between silicon surfaces in dilute ammonia peroxide mixtures (APM) and their components using atomic force microscope (AFM)

Force measurements have been conducted between H-terminated Si surface and Si tip in DI-water, NH₄OH:H₂O (1:100), H₂O ₂:H₂O (1:100) and NH₄OH:H₂O ₂:H₂O (1:1:100-1:1:500) solutions as a function of immersion time using atomic force microscopy (AFM). The approach force curve results show attractive forces in DI-water, NH₄OH:H₂O (1:100) and H₂O₂:H₂O (1:100) solutions at separation distances of less than 10 nm for all immersion times (2, 10 and 60 min) investigated in this study. In the case of dilute ammonia-hydrogen peroxide mixtures, the interaction forces are purely repulsive within 2 min of immersion time. The adhesion forces have also been measured between the surface and the tip in DI-water, NH₄OH:H₂O (1:100) and H₂O ₂:H₂O (1:100) solutions. The magnitude of the adhesion force is in the range of 0.8-10.5 nN in these solutions. In dilute APM solutions, no adhesion force is measured between the surface and the tip and repulsive forces dominated at all separation distances.