Fingerprint
Dive into the research topics of 'Study of inhibition characteristics of slurry additives in copper CMP using force spectroscopy'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Study of inhibition characteristics of slurry additives in copper CMP using force spectroscopy
A. Philipossian, H. Lee, S. V. Babu, U. Patri, Y. Hong, L. Economikos, M. Goldstein, Y. Zhuang, L. Borucki
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
4
Scopus
citations