Study of inhibition characteristics of slurry additives in copper CMP using force spectroscopy

A. Philipossian, H. Lee, S. V. Babu, U. Patri, Y. Hong, L. Economikos, M. Goldstein, Y. Zhuang, L. Borucki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

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Engineering & Materials Science