Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures

Akram A. Khosroabadi; R. A. Norwood

doi:10.1117/12.2002827

Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures

Akram A. Khosroabadi, R. A. Norwood

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.

Original language	English (US)
Title of host publication	Photonic and Phononic Properties of Engineered Nanostructures III
DOIs	https://doi.org/10.1117/12.2002827
State	Published - 2013
Event	Photonic and Phononic Properties of Engineered Nanostructures III - San Francisco, CA, United States Duration: Feb 3 2013 → Feb 7 2013

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8632
ISSN (Print)	0277-786X

Other

Other	Photonic and Phononic Properties of Engineered Nanostructures III
Country/Territory	United States
City	San Francisco, CA
Period	2/3/13 → 2/7/13

Keywords

Nanostructure
Spectroscopy ellipsometry
Transparent Conducting oxide (TCO)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2002827

Cite this

Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. / Khosroabadi, Akram A.; Norwood, R. A.
Photonic and Phononic Properties of Engineered Nanostructures III. 2013. 86320I (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8632).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Khosroabadi, AA & Norwood, RA 2013, Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures. in Photonic and Phononic Properties of Engineered Nanostructures III., 86320I, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8632, Photonic and Phononic Properties of Engineered Nanostructures III, San Francisco, CA, United States, 2/3/13. https://doi.org/10.1117/12.2002827

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abstract = "Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.",

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N2 - Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.

AB - Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.

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Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures

Abstract

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Keywords

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