Abstract
A series of sol-gel derived CaTiO3 - PbTiO3 thin films were prepared on platinized Si substrates and fired to temperatures ranging from 550C to 650C. Multiple spincoating, with an intermediate firing of 400C between coatings, was performed to obtain films up to 0.5 μm thick. All the films were single phase perovskite after firing to 600C. The dielectric constant ranged from 100-300 depending on the amount of Ca. Leakage currents as low as 2*10-9 A/cm2 were obtained in these films.
Original language | English (US) |
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Pages | 487-490 |
Number of pages | 4 |
State | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) - East Brunswick, NJ, USA Duration: Aug 18 1996 → Aug 21 1996 |
Other
Other | Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) |
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City | East Brunswick, NJ, USA |
Period | 8/18/96 → 8/21/96 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering