@inproceedings{9fc16268440f4283ab869e649afa543d,
title = "Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped and gallium-doped zinc oxide thin films as transparent conductive electrodes",
abstract = "Zinc oxide and aluninum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (Rs) of ∼ 200 Ω/sq and ∼ 150 Ω/sq, respectively.",
author = "Zhaozhao Zhu and Trent Mankowski and Kaushik Balakrishnan and Shikoh, {Ali Sehpar} and Farid Touati and Benammar, {Mohieddine A.} and Masud Mansuripur and Falco, {Charles M.}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Thin Films for Solar and Energy Technology VII ; Conference date: 09-08-2015 Through 10-08-2015",
year = "2015",
doi = "10.1117/12.2186144",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Eldada, {Louay A.} and Heben, {Michael J.}",
booktitle = "Thin Films for Solar and Energy Technology VII",
}