Snapshot Roughness Measurement Method Using Polarization Lateral Shearing Interferometry

Hyo Mi Park; Luke D. Mayer; Daewook Kim; Ki Nam Joo

Snapshot Roughness Measurement Method Using Polarization Lateral Shearing Interferometry

Hyo Mi Park, Luke D. Mayer, Daewook Kim, Ki Nam Joo

Optical Sciences

Research output: Contribution to conference › Paper › peer-review

Abstract

We propose a snapshot roughness measurement method based on the measurement result of a lateral shearing interferometer. In this method, various roughness parameters are calculated from a sheared interferogram without any sophisticated surface reconstruction algorithms.

Original language	English (US)
State	Published - 2023
Event	2023 Optical Fabrication and Testing, OFT 2023 in Optica Design and Fabrication Congress - Part of Optica Design and Fabrication Congress - Quebec City, Canada Duration: Jun 4 2023 → Jun 8 2023

Conference

Conference	2023 Optical Fabrication and Testing, OFT 2023 in Optica Design and Fabrication Congress - Part of Optica Design and Fabrication Congress
Country/Territory	Canada
City	Quebec City
Period	6/4/23 → 6/8/23

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Space and Planetary Science
Control and Systems Engineering
Electrical and Electronic Engineering
Instrumentation
General Computer Science
Electronic, Optical and Magnetic Materials

Cite this

Snapshot Roughness Measurement Method Using Polarization Lateral Shearing Interferometry. / Park, Hyo Mi; Mayer, Luke D.; Kim, Daewook et al.
2023. Paper presented at 2023 Optical Fabrication and Testing, OFT 2023 in Optica Design and Fabrication Congress - Part of Optica Design and Fabrication Congress, Quebec City, Canada.

Research output: Contribution to conference › Paper › peer-review

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abstract = "We propose a snapshot roughness measurement method based on the measurement result of a lateral shearing interferometer. In this method, various roughness parameters are calculated from a sheared interferogram without any sophisticated surface reconstruction algorithms.",

author = "Park, {Hyo Mi} and Mayer, {Luke D.} and Daewook Kim and Joo, {Ki Nam}",

note = "Publisher Copyright: {\textcopyright} 2023 The Author (s).; 2023 Optical Fabrication and Testing, OFT 2023 in Optica Design and Fabrication Congress - Part of Optica Design and Fabrication Congress ; Conference date: 04-06-2023 Through 08-06-2023",

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T1 - Snapshot Roughness Measurement Method Using Polarization Lateral Shearing Interferometry

AU - Park, Hyo Mi

AU - Mayer, Luke D.

AU - Kim, Daewook

AU - Joo, Ki Nam

PY - 2023

Y1 - 2023

N2 - We propose a snapshot roughness measurement method based on the measurement result of a lateral shearing interferometer. In this method, various roughness parameters are calculated from a sheared interferogram without any sophisticated surface reconstruction algorithms.

AB - We propose a snapshot roughness measurement method based on the measurement result of a lateral shearing interferometer. In this method, various roughness parameters are calculated from a sheared interferogram without any sophisticated surface reconstruction algorithms.

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M3 - Paper

AN - SCOPUS:85193055195

T2 - 2023 Optical Fabrication and Testing, OFT 2023 in Optica Design and Fabrication Congress - Part of Optica Design and Fabrication Congress

Y2 - 4 June 2023 through 8 June 2023

ER -

Snapshot Roughness Measurement Method Using Polarization Lateral Shearing Interferometry

Abstract

Conference

ASJC Scopus subject areas

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