Snapshot multi-wavelength interference microscope

Xiaobo Tian; Xingzhou Tu; Junchao Zhang; Oliver Spires; Neal Brock; Stanley Pau; Rongguang Liang

doi:10.1364/OE.26.018279

Snapshot multi-wavelength interference microscope

Xiaobo Tian
, Xingzhou Tu
, Junchao Zhang
, Oliver Spires
, Neal Brock
, Stanley Pau
, Rongguang Liang

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

Original language	English (US)
Journal	Optics Express
Volume	26
Issue number	14
DOIs	https://doi.org/10.1364/OE.26.018279
State	Published - Jul 9 2018

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.26.018279

Cite this

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title = "Snapshot multi-wavelength interference microscope",

abstract = "A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.",

author = "Xiaobo Tian and Xingzhou Tu and Junchao Zhang and Oliver Spires and Neal Brock and Stanley Pau and Rongguang Liang",

note = "Publisher Copyright: {\textcopyright} 2018 Optical Society of America.",

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AU - Tian, Xiaobo

AU - Tu, Xingzhou

AU - Zhang, Junchao

AU - Spires, Oliver

AU - Brock, Neal

AU - Pau, Stanley

AU - Liang, Rongguang

PY - 2018/7/9

Y1 - 2018/7/9

N2 - A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

AB - A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

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UR - https://www.scopus.com/pages/publications/85049571919#tab=citedBy

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SN - 1094-4087

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JO - Optics Express

JF - Optics Express

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ER -

Snapshot multi-wavelength interference microscope

Abstract

ASJC Scopus subject areas

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