Snapshot multi-wavelength interference microscope

Xiaobo Tian; Xingzhou Tu; Junchao Zhang; Oliver Spires; Neal Brock; Stanley Pau; Rongguang Liang

doi:10.1364/OE.26.018279

Snapshot multi-wavelength interference microscope

Xiaobo Tian, Xingzhou Tu, Junchao Zhang, Oliver Spires, Neal Brock, Stanley Pau, Rongguang Liang

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

Original language	English (US)
Journal	Optics Express
Volume	26
Issue number	14
DOIs	https://doi.org/10.1364/OE.26.018279
State	Published - Jul 9 2018

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.26.018279

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@article{ffa646e095724a7a98d7d8b1b9d857e6,

title = "Snapshot multi-wavelength interference microscope",

abstract = "A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.",

author = "Xiaobo Tian and Xingzhou Tu and Junchao Zhang and Oliver Spires and Neal Brock and Stanley Pau and Rongguang Liang",

note = "Publisher Copyright: {\textcopyright} 2018 Optical Society of America.",

year = "2018",

month = jul,

day = "9",

doi = "10.1364/OE.26.018279",

language = "English (US)",

volume = "26",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optica Publishing Group (formerly OSA)",

number = "14",

}

TY - JOUR

T1 - Snapshot multi-wavelength interference microscope

AU - Tian, Xiaobo

AU - Tu, Xingzhou

AU - Zhang, Junchao

AU - Spires, Oliver

AU - Brock, Neal

AU - Pau, Stanley

AU - Liang, Rongguang

PY - 2018/7/9

Y1 - 2018/7/9

N2 - A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

AB - A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.

UR - http://www.scopus.com/inward/record.url?scp=85049571919&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85049571919&partnerID=8YFLogxK

U2 - 10.1364/OE.26.018279

DO - 10.1364/OE.26.018279

M3 - Article

C2 - 30114009

AN - SCOPUS:85049571919

SN - 1094-4087

VL - 26

JO - Optics Express

JF - Optics Express

IS - 14

ER -

Snapshot multi-wavelength interference microscope

Abstract

ASJC Scopus subject areas

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