Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies

William R. McGrath; Christopher Walker; Markus Yap; Yu Chong Tai

doi:10.1109/75.205665

Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies

William R. McGrath, Christopher Walker, Markus Yap, Yu Chong Tai

Research output: Contribution to journal › Article › peer-review

93 Scopus citations

Abstract

Rectangular waveguide is commonly used up to high millimeter-wave frequencies. However, conventional machining techniques for waveguides operating above a few hundred GHz are complicated and costly. The development of silicon micro-machining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion loss measurements of gold plated silicon waveguide show performance comparable to standard metal waveguides. It is suggested that active devices and planar circuits can be integrated with the waveguides, solving the traditional mounting problems.

Original language	English (US)
Pages (from-to)	61-63
Number of pages	3
Journal	IEEE Microwave and Guided Wave Letters
Volume	3
Issue number	3
DOIs	https://doi.org/10.1109/75.205665
State	Published - Mar 1993

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1109/75.205665

Cite this

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title = "Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies",

abstract = "Rectangular waveguide is commonly used up to high millimeter-wave frequencies. However, conventional machining techniques for waveguides operating above a few hundred GHz are complicated and costly. The development of silicon micro-machining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion loss measurements of gold plated silicon waveguide show performance comparable to standard metal waveguides. It is suggested that active devices and planar circuits can be integrated with the waveguides, solving the traditional mounting problems.",

author = "McGrath, {William R.} and Christopher Walker and Markus Yap and Tai, {Yu Chong}",

note = "Funding Information: Manuscript received October 5, 1992. This work was supported by the Strategic Defense Initiative Organization, Innovative Science and Technology Office, and the National Aeronautics and Space Administration, and the Caltech President's Fund. This work was carried out by the Jet Propulsion Laboratory, Califomia Institute of Technology.",

year = "1993",

month = mar,

doi = "10.1109/75.205665",

language = "English (US)",

volume = "3",

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TY - JOUR

T1 - Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies

AU - McGrath, William R.

AU - Walker, Christopher

AU - Yap, Markus

AU - Tai, Yu Chong

N1 - Funding Information: Manuscript received October 5, 1992. This work was supported by the Strategic Defense Initiative Organization, Innovative Science and Technology Office, and the National Aeronautics and Space Administration, and the Caltech President's Fund. This work was carried out by the Jet Propulsion Laboratory, Califomia Institute of Technology.

PY - 1993/3

Y1 - 1993/3

N2 - Rectangular waveguide is commonly used up to high millimeter-wave frequencies. However, conventional machining techniques for waveguides operating above a few hundred GHz are complicated and costly. The development of silicon micro-machining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion loss measurements of gold plated silicon waveguide show performance comparable to standard metal waveguides. It is suggested that active devices and planar circuits can be integrated with the waveguides, solving the traditional mounting problems.

AB - Rectangular waveguide is commonly used up to high millimeter-wave frequencies. However, conventional machining techniques for waveguides operating above a few hundred GHz are complicated and costly. The development of silicon micro-machining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion loss measurements of gold plated silicon waveguide show performance comparable to standard metal waveguides. It is suggested that active devices and planar circuits can be integrated with the waveguides, solving the traditional mounting problems.

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Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies

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