Abstract
A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 11771-11782 |
| Number of pages | 12 |
| Journal | Optics Express |
| Volume | 23 |
| Issue number | 9 |
| DOIs | |
| State | Published - May 4 2015 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
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