Sensitivity analysis and optimization method for the fabrication of one-dimensional beam-splitting phase gratings

Shaun Pacheco; Jonathan F. Brand; Melissa Zaverton; Tom Milster; Rongguang Liang

doi:10.1364/OE.23.011771

Sensitivity analysis and optimization method for the fabrication of one-dimensional beam-splitting phase gratings

Shaun Pacheco, Jonathan F. Brand, Melissa Zaverton, Tom Milster, Rongguang Liang

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating.

Original language	English (US)
Pages (from-to)	11771-11782
Number of pages	12
Journal	Optics Express
Volume	23
Issue number	9
DOIs	https://doi.org/10.1364/OE.23.011771
State	Published - May 4 2015

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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abstract = "A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating.",

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AU - Milster, Tom

AU - Liang, Rongguang

PY - 2015/5/4

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N2 - A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating.

AB - A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating.

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Sensitivity analysis and optimization method for the fabrication of one-dimensional beam-splitting phase gratings

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