@inproceedings{31fe878191594c88b5eff4fc076401dc,
title = "Self-referenced surface profilometry",
author = "Parks, {R. E.} and Peng Su and Oh, {Chang Jin} and Burge, {J. H.}",
year = "2010",
language = "English (US)",
isbn = "9781887706568",
series = "Proceedings - ASPE 2010 Annual Meeting",
pages = "29--32",
booktitle = "Proceedings - ASPE 2010 Annual Meeting",
note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",
}