@inproceedings{f20c76848f1d47f48f27ff1fee467bf5,
title = "Scots, an alternative to surface topographic interferometry",
author = "Peng Su and Parks, {Robert E.} and Roger Angel and Lirong Wang and Burge, {James H.}",
year = "2010",
language = "English (US)",
isbn = "9781887706544",
series = "Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010",
pages = "52--57",
booktitle = "Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010",
note = "ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010 ; Conference date: 23-06-2010 Through 25-06-2010",
}