Scanning probe metrology in the presence of surface charge

J. E. Griffith, E. M. Kneedler, S. Ningen, A. Berghaus, C. E. Bryson, S. Pau, E. Houge, T. Shofner

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


The operation of a scanning force microscope that is relatively immune to charge-induced forces while allowing the probe tip to nondestructively follow the surface topography is discussed. A servoed force-balance sensor is incorporated in the instrument. The sensor responded to forces associated with the solid surfaces and not to the forces arising from charging or contamination.

Original languageEnglish (US)
Pages (from-to)3264-3267
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number6
StatePublished - Nov 2000
Event44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA
Duration: May 30 2000Jun 2 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Scanning probe metrology in the presence of surface charge'. Together they form a unique fingerprint.

Cite this