Scanning probe metrology in the presence of surface charge

J. E. Griffith; E. M. Kneedler; S. Ningen; A. Berghaus; C. E. Bryson; S. Pau; E. Houge; T. Shofner

doi:10.1116/1.1313586

Scanning probe metrology in the presence of surface charge

J. E. Griffith, E. M. Kneedler, S. Ningen, A. Berghaus, C. E. Bryson, S. Pau, E. Houge, T. Shofner

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The operation of a scanning force microscope that is relatively immune to charge-induced forces while allowing the probe tip to nondestructively follow the surface topography is discussed. A servoed force-balance sensor is incorporated in the instrument. The sensor responded to forces associated with the solid surfaces and not to the forces arising from charging or contamination.

Original language	English (US)
Pages (from-to)	3264-3267
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	6
DOIs	https://doi.org/10.1116/1.1313586
State	Published - Nov 2000
Externally published	Yes
Event	44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA Duration: May 30 2000 → Jun 2 2000

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1116/1.1313586

Cite this

@article{cce66edbb7b544f1a843561c46cd91cb,

title = "Scanning probe metrology in the presence of surface charge",

abstract = "The operation of a scanning force microscope that is relatively immune to charge-induced forces while allowing the probe tip to nondestructively follow the surface topography is discussed. A servoed force-balance sensor is incorporated in the instrument. The sensor responded to forces associated with the solid surfaces and not to the forces arising from charging or contamination.",

author = "Griffith, {J. E.} and Kneedler, {E. M.} and S. Ningen and A. Berghaus and Bryson, {C. E.} and S. Pau and E. Houge and T. Shofner",

year = "2000",

month = nov,

doi = "10.1116/1.1313586",

language = "English (US)",

volume = "18",

pages = "3264--3267",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

note = "44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication ; Conference date: 30-05-2000 Through 02-06-2000",

}

TY - JOUR

T1 - Scanning probe metrology in the presence of surface charge

AU - Griffith, J. E.

AU - Kneedler, E. M.

AU - Ningen, S.

AU - Berghaus, A.

AU - Bryson, C. E.

AU - Pau, S.

AU - Houge, E.

AU - Shofner, T.

PY - 2000/11

Y1 - 2000/11

N2 - The operation of a scanning force microscope that is relatively immune to charge-induced forces while allowing the probe tip to nondestructively follow the surface topography is discussed. A servoed force-balance sensor is incorporated in the instrument. The sensor responded to forces associated with the solid surfaces and not to the forces arising from charging or contamination.

AB - The operation of a scanning force microscope that is relatively immune to charge-induced forces while allowing the probe tip to nondestructively follow the surface topography is discussed. A servoed force-balance sensor is incorporated in the instrument. The sensor responded to forces associated with the solid surfaces and not to the forces arising from charging or contamination.

UR - http://www.scopus.com/inward/record.url?scp=0034315158&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034315158&partnerID=8YFLogxK

U2 - 10.1116/1.1313586

DO - 10.1116/1.1313586

M3 - Conference article

AN - SCOPUS:0034315158

SN - 1071-1023

VL - 18

SP - 3264

EP - 3267

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

T2 - 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Y2 - 30 May 2000 through 2 June 2000

ER -

Scanning probe metrology in the presence of surface charge

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this