Robust, common path, phase shifting interferometer and optical profilometer

Remy Tumbar, Daniel L. Marks, David J. Brady

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We describe an improved implementation of our previously reported common-path, phase shifting, and shearing interferometer. Using a time-multiplexed phase shifting scheme, we demonstrate higher sampling resolution, better light sensitivity, and use of arbitrary phase shifting algorithms. We describe microscopic imaging of the surface profile of a copper-plated silicon wafer and demonstrate that the system is vibration insensitive with ∼λ/100 repeatability. In a more general discussion of our method, we describe the different functional elements and suggest alternative designs and improvements. Possible uses include full-field coherent imaging and high dynamic range wavefront sensing, which we briefly discuss.

Original languageEnglish (US)
Pages (from-to)B32-B43
JournalApplied optics
Volume47
Issue number10
DOIs
StatePublished - Apr 1 2008
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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