@inproceedings{6b3bc924d87544b6a05e9e4980b0735e,
title = "Robust and objective automatic optical surface inspection using modulated dark field phasing illumination",
abstract = "Dark field illumination (DFI) is an elegant inspection technique sometimes used to detect particles on a specular surface. However, traditional DFI struggles with repeatability, limiting its applications in automated inspection. We present an improvement to DFI by introducing a modulated dark field illumination (MDFI) that utilizes the phase rather than the intensity in the detection of defects. For modulated dark field illumination (MDFI), the phase-based information is independent from the reflectance of the surface, but has a higher sensitivity to the light scattered from a defect than DFI. As a result, we obtain a robust computational image process method that is insensitive to the environment and provides clearly defined defect information. In order to extend the application to industry, the instantaneous MDFI systems were developed and validated.",
keywords = "Automatic optical inspection, Dark field, Particle detection, Phase measurement",
author = "Heejoo Choi and John Kam and Berkson, {Joel D.} and Graves, {Logan R.} and Huang Lei and Kim, {Dae Wook}",
note = "Funding Information: Acknowledgment: This research was made possible in part by the II-VI Foundation Block-Gift Program, the Technology Research Initiative Fund Optics/Imaging Program, and the Friends of Tucson Optics Endowed Scholarships in Optical Sciences. The authors wish to thank Spectral Optics for the use of their equipment. Publisher Copyright: {\textcopyright} 2019 SPIE.; Applied Optical Metrology III 2019 ; Conference date: 13-08-2019 Through 15-08-2019",
year = "2019",
doi = "10.1117/12.2529869",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Erik Novak and Trolinger, {James D.}",
booktitle = "Applied Optical Metrology III",
}