Review-understanding and controlling electrochemical effects in wet processing

S. Raghavan; C. C. Chiang

doi:10.1149/2.0041606jss

Review-understanding and controlling electrochemical effects in wet processing

S. Raghavan, C. C. Chiang

Materials Science and Engineering

Research output: Contribution to journal › Review article › peer-review

2 Scopus citations

Abstract

Electrochemical techniques have long been used in understanding and improving the performance of various wet chemical processing steps such as etching, cleaning, passivation and rinsing used in integrated circuit (IC) manufacturing. The objective of this paper is to provide a few examples of how electrochemical techniques can be used to probe some important areas in wet processing. It is not intended to be an exhaustive review of techniques and problems reported in the literature.

Original language	English (US)
Pages (from-to)	P309-P314
Journal	ECS Journal of Solid State Science and Technology
Volume	5
Issue number	6
DOIs	https://doi.org/10.1149/2.0041606jss
State	Published - 2016

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials

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10.1149/2.0041606jss

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title = "Review-understanding and controlling electrochemical effects in wet processing",

abstract = "Electrochemical techniques have long been used in understanding and improving the performance of various wet chemical processing steps such as etching, cleaning, passivation and rinsing used in integrated circuit (IC) manufacturing. The objective of this paper is to provide a few examples of how electrochemical techniques can be used to probe some important areas in wet processing. It is not intended to be an exhaustive review of techniques and problems reported in the literature.",

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AU - Chiang, C. C.

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AB - Electrochemical techniques have long been used in understanding and improving the performance of various wet chemical processing steps such as etching, cleaning, passivation and rinsing used in integrated circuit (IC) manufacturing. The objective of this paper is to provide a few examples of how electrochemical techniques can be used to probe some important areas in wet processing. It is not intended to be an exhaustive review of techniques and problems reported in the literature.

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Review-understanding and controlling electrochemical effects in wet processing

Abstract

ASJC Scopus subject areas

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