Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

John E. Greivenkamp; Kevin G. Sullivan; Russell J. Palum

doi:10.1117/12.962809

Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

John E. Greivenkamp, Kevin G. Sullivan, Russell J. Palum

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

Original language	English (US)
Pages (from-to)	84-79
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1164
DOIs	https://doi.org/10.1117/12.962809
State	Published - Dec 20 1989
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.962809

Cite this

@article{60ab4316afe04f71a3186ce498d2c161,

title = "Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information",

abstract = "One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.",

author = "Greivenkamp, {John E.} and Sullivan, {Kevin G.} and Palum, {Russell J.}",

year = "1989",

month = dec,

day = "20",

doi = "10.1117/12.962809",

language = "English (US)",

volume = "1164",

pages = "84--79",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

AU - Greivenkamp, John E.

AU - Sullivan, Kevin G.

AU - Palum, Russell J.

PY - 1989/12/20

Y1 - 1989/12/20

N2 - One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

AB - One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

UR - http://www.scopus.com/inward/record.url?scp=84955143902&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84955143902&partnerID=8YFLogxK

U2 - 10.1117/12.962809

DO - 10.1117/12.962809

M3 - Article

AN - SCOPUS:84955143902

SN - 0277-786X

VL - 1164

SP - 84

EP - 79

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this