@article{20b542b657004ba1a85c322d6cc63599,
title = "Research Accomplishments at the University of Arizona SEMATECH Center of Excellence for Contamination/Defect Assessment and Control",
abstract = "The Arizona SEMATECH Center of Excellence (SCOE) was established in May of 1988, is funded by SEMA-TECH and contractually monitored by the Semiconductor Research Corporation (SRC). The SCOE is engaged in research in a broad front to understand and control contamination which causes yield limiting defects in submicron ULSI circuits. Sandia National Laboratory personnel are integrated with UA personnel in the SCOE research. The focus of the research is on contaminants, both particulates and homogeneous or distributed, which originate in, are caused by, or are transported and deposited by process gases and chemicals or process equipment. Further, the work involves investigating the mapping from contaminants and contaminant levels to degradation of device properties. The resulting degradation in device properties can then be used to estimate the effects of such contaminants for submicron processes and circuits. Results achieved during the four years of the SCOE{\textquoteright}s existence are describe in this paper.",
author = "Parks, {Harold G.} and O{\textquoteright}Hanlon, {John F.} and Farhang Shadman",
note = "Funding Information: Manuscript received October 27, 1992; revised November 30, 1992. This work was performed at the University of Arizona SEMATECH Center of Excellence for Defect Contaminating Assessment and Control and Sandia National Laboratories under contract to SEMATECH as administered by the Semiconductor Research Corporation under Contract Nos. 88 and 91-MC-501. H. G. Parks and J. F. O{\textquoteright}Hanlon are with the Electrical and Computer Engineering Department, University of Arizona, Tucson, AZ 85721. F. Shadman is with the Chemical Engineering Department, University of Arizona, Tucson, AZ 85721. IEEE Log Number 9207707. Funding Information: Absrrucr-The Arizona SEMATECH Center of Excellence (SCOE) was established in May of 1988, is funded by SEMA-TECH and contractually monitored by the Semiconductor Research Corporation (SRC). The SCOE is engaged in research in a broad front to understand and control contamination which causes yield limiting defects in submicron ULSI circuits. Sandia National Laboratory personnel are integrated with UA personnel in the SCOE research. The focus of the research is on contaminants, both particulates and homogeneous or distributed, which originate in, are caused by, or are transported and deposited by process gases and chemicals or process equipment. Further, the work involves investigating the mapping from contaminants and contaminant levels to degradation of device properties. The resulting degradation in device properties can then be used to estimate the effects of such contaminants for submicron processes and circuits. Results achieved during the four years of the SCOE{\textquoteright}s existence are describe in this paper.",
year = "1993",
month = may,
doi = "10.1109/66.216932",
language = "English (US)",
volume = "6",
pages = "134--142",
journal = "IEEE Transactions on Semiconductor Manufacturing",
issn = "0894-6507",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",
}