Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control

H. G. Parks; J. F. O'Hanlon; F. Shadman

Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control

H. G. Parks, J. F. O'Hanlon, F. Shadman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The Arizona SEMATECH Center of Excellence (SCOE) was established in May of 1988. The SCOE is engaged in research on a broad front to understand and control contamination which causes yield-limiting defects in submicron ULSI circuits. Sandia National Laboratory personnel are integrated with UA personnel in the SCOE research. The focus of the research is on contaminants, both particulates and homogeneous or distributed, which originate in, are caused by, or are transported and deposited by process gases and chemicals or process equipment. Further, the work involves investigating the mapping from contaminants and contaminant levels to circuit defects for submicron processes and circuit technologies. Results achieved during the three years of SCOE's existence are described.

Original language	English (US)
Title of host publication	IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Publisher	Publ by IEEE
Pages	9-16
Number of pages	8
ISBN (Print)	0780301528
State	Published - 1992
Event	1991 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA Duration: Oct 21 1991 → Oct 23 1991

Publication series

Name	IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Other

Other	1991 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
City	Boston, MA, USA
Period	10/21/91 → 10/23/91

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Cite this

Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control. / Parks, H. G.; O'Hanlon, J. F.; Shadman, F.
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. Publ by IEEE, 1992. p. 9-16 (IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Parks, HG, O'Hanlon, JF & Shadman, F 1992, Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control. in IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Publ by IEEE, pp. 9-16, 1991 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Boston, MA, USA, 10/21/91.

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Research accomplishments at the University of Arizona SEMATECH Center of Excellence for contamination/defect assessment and control

Abstract

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Other

ASJC Scopus subject areas

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