@inproceedings{42427ed724e44ae69fd0a2ec7453a278,
title = "Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions",
abstract = "Removal of gold particles (100 nm) from chromium oxynitride surface (CrON) has been investigated using dilute sulfuric acid solutions. Two types of gold nano-particles, one with a negative surface charge and the other with a positive charge achieved by adsorption of poly diallyl-dimethyl ammonium chloride (PDAC), were used. Particle removal efficiency (PRE) increases with sulfuric acid concentration and bath temperature. In 1:10 H2SO4:DI solution, increasing the bath temperature from 25 to 100°C increases the PRE from 21 to 99 %. Introduction of megasonic energy at 0.43 W/cm2 in a 1:10 H2SO4:DI bath at 35°C increases the PRE to 88 %. PDAC coated gold particles are difficult to remove as compared to uncoated particles due to their electrostatic interaction with the surface leading to stronger adhesion.",
author = "V. Pandit and M. Keswani and S. Raghavan and K. Muralidharan and P. Deymier and F. Eshbach and A. Sengupta and H. Yun",
year = "2007",
doi = "10.1149/1.2779412",
language = "English (US)",
isbn = "9781566775687",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "2",
pages = "471--478",
booktitle = "ECS Transactions - 10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing",
edition = "2",
note = "10th International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing - 212th ECS Meeting ; Conference date: 07-10-2007 Through 12-10-2007",
}