TY - JOUR
T1 - Regularized model of post-touchdown configurations in electrostatic MEMS
T2 - Equilibrium analysis
AU - Lindsay, A. E.
AU - Lega, J.
AU - Glasner, K. B.
N1 - Funding Information:
K.G. acknowledges support from National Science Foundation award DMS-0807423 . A.E.L acknowledges support from the Carnegie Trust for the Universities of Scotland . A.E.L and J.L. completed the manuscript during a stay at the Henri Poincaré Institute in July 2013 and thank them for their hospitality.
PY - 2014/7/1
Y1 - 2014/7/1
N2 - In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touchdown whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical divergence of the electric field. In the present work, we propose novel regularized governing equations whose solutions remain finite at touchdown and exhibit additional dynamics beyond this initial event before eventually relaxing to new stable equilibria. We employ techniques from variational calculus, dynamical systems and singular perturbation theory to obtain a detailed understanding of the properties and equilibrium solutions of the regularized family of equations.
AB - In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touchdown whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical divergence of the electric field. In the present work, we propose novel regularized governing equations whose solutions remain finite at touchdown and exhibit additional dynamics beyond this initial event before eventually relaxing to new stable equilibria. We employ techniques from variational calculus, dynamical systems and singular perturbation theory to obtain a detailed understanding of the properties and equilibrium solutions of the regularized family of equations.
KW - Blow up
KW - Higher order partial differential equations
KW - Nano-technology
KW - Regularization
KW - Singular perturbation techniques
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U2 - 10.1016/j.physd.2014.04.007
DO - 10.1016/j.physd.2014.04.007
M3 - Article
AN - SCOPUS:84901461468
VL - 280-281
SP - 95
EP - 108
JO - Physica D: Nonlinear Phenomena
JF - Physica D: Nonlinear Phenomena
SN - 0167-2789
ER -