Real-time measurement of tool misalignment on the Opticam system

Tong Xie, John E. Greivenkamp, Matthew T. Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper describes an online noncontact metrology system for tool misalignment detection on the Opticam spherical surface generator. The system detects distortion due to surface errors in the reflected image of a bar target. The amount of image distortion is determined by the relative slope changes on the test surface, and it can be calculated as a phase function of the reflected image. The phase function can be used to determine surface slope variation of the test part, and this slope information can be used to determine the cutting tool misalignment in the Opticam system.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages212-219
Number of pages8
StatePublished - 1995
EventOptical Manufacturing and Testing - San Diego, CA, USA
Duration: Jul 9 1995Jul 11 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2536
ISSN (Print)0277-786X

Other

OtherOptical Manufacturing and Testing
CitySan Diego, CA, USA
Period7/9/957/11/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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