Abstract
We present a chemical sensor scheme based on selective sensing surfaces and highly sensitive integrated optical transduction methods. Using self-assembly techniques, species selective thin-films are covalently attached to the surface of Si3N4 channel waveguides to produce robust sensor elements. Exposure to targeted analyses results in the selective absorption of these molecules onto the waveguide surface causing a change in the effective refractive index of the guided modes. These relative changes in effective refractive index between TE and TM modes are precisely measured using Zeeman interferometry. Our measurements demonstrate reversible, real time sensing of volatile organic compounds at ppm levels.
Original language | English (US) |
---|---|
Pages (from-to) | 27-32 |
Number of pages | 6 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3383 |
DOIs | |
State | Published - 1998 |
Event | Electro-Optical Technology for Remote Chemical Detection and Identification III - Orlando, FL, United States Duration: Apr 13 1998 → Apr 13 1998 |
Keywords
- Chemical sensors
- Evanescent field sensing
- Waveguide interferometry
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering