Quartz channel fabrication for electrokinetically driven separations

C. M. Matzke, D. W. Arnold, C. I.H. Ashby, S. H. Kravitz, M. E. Warren, C. G. Bailey

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


For well resolved electrokinetic separation, we utilize crystalline quartz to micromachine a uniformly packed separation channel. Packing features are posts 5 μm on a side with 3 μm spacing and etched 42 μm deep. In addition to anisotropic wet etch characteristics for micromachining, quartz properties are compatible with chemical solutions, electrokinetic high voltage operation, and stationary phase film depositions. To seal these channels, we employ a room temperature silicon-oxynitride deposition to form a membrane, that is subsequently coated for mechanical stability. Using this technique, particulate issues and global warp, that make large area wafer bonding methods difficult, are avoided, and a room temperature process, in contrast to high temperature bonding techniques, accommodate preprocessing of metal films for electrical interconnect. After sealing channels, a number of macro-assembly steps are required to attach a micro-optical detection system and fluid interconnects.

Original languageEnglish (US)
Pages (from-to)164-171
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 Conference on Microfluidic Devices and Systems - Santa Clara, CA, USA
Duration: Sep 21 1998Sep 22 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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