Processing challenges in the fabrication of advanced MEMS

A. Kornblit; V. A. Aksyuk; G. R. Bogart; C. Bolle; J. E. Bower; R. A. Cirelli; E. Ferry; L. Fetter; A. Gasparyan; D. S. Greywall; R. C. Keller; F. P. Klemens; W. Y.C. Lai; O. D. Lopez; W. M. Mansfield; J. F. Miner; C. S. Pai; F. Pardo; S. Pau; M. E. Simon; T. Sorsch; J. A. Taylor; D. M. Tennant; G. P. Watson

Processing challenges in the fabrication of advanced MEMS

A. Kornblit, V. A. Aksyuk, G. R. Bogart, C. Bolle, J. E. Bower, R. A. Cirelli, E. Ferry, L. Fetter, A. Gasparyan, D. S. Greywall, R. C. Keller, F. P. Klemens, W. Y.C. Lai, O. D. Lopez, W. M. Mansfield, J. F. Miner, C. S. Pai, F. Pardo, S. Pau, M. E. SimonT. Sorsch, J. A. Taylor, D. M. Tennant, G. P. Watson

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Abstract

As higher performance and complexity is demanded from advanced MEMS, the processes required to fabricate them are becoming much more demanding. Sub-micron features, rarely found in early MEMS, are now needed for unproved performance. Advanced processes, relying on tools that are available for high-performance ICs, can be used to achieve the desired functionality of advanced MEMS. This paper focuses mainly on devices in the optical domain, but the techniques to fabricate them are common to all MEMS.

Original language	English (US)
Pages	11-25
Number of pages	15
State	Published - 2004
Externally published	Yes
Event	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States Duration: Oct 3 2004 → Oct 8 2004

Other

Other	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium
Country/Territory	United States
City	Honolulu, HI
Period	10/3/04 → 10/8/04

ASJC Scopus subject areas

General Engineering

Cite this

Kornblit, A., Aksyuk, V. A., Bogart, G. R., Bolle, C., Bower, J. E., Cirelli, R. A., Ferry, E., Fetter, L., Gasparyan, A., Greywall, D. S., Keller, R. C., Klemens, F. P., Lai, W. Y. C., Lopez, O. D., Mansfield, W. M., Miner, J. F., Pai, C. S., Pardo, F., Pau, S., ... Watson, G. P. (2004). Processing challenges in the fabrication of advanced MEMS. 11-25. Paper presented at Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, United States.

Kornblit, A, Aksyuk, VA, Bogart, GR, Bolle, C, Bower, JE, Cirelli, RA, Ferry, E, Fetter, L, Gasparyan, A, Greywall, DS, Keller, RC, Klemens, FP, Lai, WYC, Lopez, OD, Mansfield, WM, Miner, JF, Pai, CS, Pardo, F, Pau, S, Simon, ME, Sorsch, T, Taylor, JA, Tennant, DM & Watson, GP 2004, 'Processing challenges in the fabrication of advanced MEMS', Paper presented at Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, United States, 10/3/04 - 10/8/04 pp. 11-25.

@conference{f6349f6c6fc845e091eb787ffb1129c6,

title = "Processing challenges in the fabrication of advanced MEMS",

abstract = "As higher performance and complexity is demanded from advanced MEMS, the processes required to fabricate them are becoming much more demanding. Sub-micron features, rarely found in early MEMS, are now needed for unproved performance. Advanced processes, relying on tools that are available for high-performance ICs, can be used to achieve the desired functionality of advanced MEMS. This paper focuses mainly on devices in the optical domain, but the techniques to fabricate them are common to all MEMS.",

author = "A. Kornblit and Aksyuk, {V. A.} and Bogart, {G. R.} and C. Bolle and Bower, {J. E.} and Cirelli, {R. A.} and E. Ferry and L. Fetter and A. Gasparyan and Greywall, {D. S.} and Keller, {R. C.} and Klemens, {F. P.} and Lai, {W. Y.C.} and Lopez, {O. D.} and Mansfield, {W. M.} and Miner, {J. F.} and Pai, {C. S.} and F. Pardo and S. Pau and Simon, {M. E.} and T. Sorsch and Taylor, {J. A.} and Tennant, {D. M.} and Watson, {G. P.}",

year = "2004",

language = "English (US)",

pages = "11--25",

note = "Microfabricated Systems and MEMS VII - Proceedings of the International Symposium ; Conference date: 03-10-2004 Through 08-10-2004",

}

TY - CONF

T1 - Processing challenges in the fabrication of advanced MEMS

AU - Kornblit, A.

AU - Aksyuk, V. A.

AU - Bogart, G. R.

AU - Bolle, C.

AU - Bower, J. E.

AU - Cirelli, R. A.

AU - Ferry, E.

AU - Fetter, L.

AU - Gasparyan, A.

AU - Greywall, D. S.

AU - Keller, R. C.

AU - Klemens, F. P.

AU - Lai, W. Y.C.

AU - Lopez, O. D.

AU - Mansfield, W. M.

AU - Miner, J. F.

AU - Pai, C. S.

AU - Pardo, F.

AU - Pau, S.

AU - Simon, M. E.

AU - Sorsch, T.

AU - Taylor, J. A.

AU - Tennant, D. M.

AU - Watson, G. P.

PY - 2004

Y1 - 2004

N2 - As higher performance and complexity is demanded from advanced MEMS, the processes required to fabricate them are becoming much more demanding. Sub-micron features, rarely found in early MEMS, are now needed for unproved performance. Advanced processes, relying on tools that are available for high-performance ICs, can be used to achieve the desired functionality of advanced MEMS. This paper focuses mainly on devices in the optical domain, but the techniques to fabricate them are common to all MEMS.

AB - As higher performance and complexity is demanded from advanced MEMS, the processes required to fabricate them are becoming much more demanding. Sub-micron features, rarely found in early MEMS, are now needed for unproved performance. Advanced processes, relying on tools that are available for high-performance ICs, can be used to achieve the desired functionality of advanced MEMS. This paper focuses mainly on devices in the optical domain, but the techniques to fabricate them are common to all MEMS.

UR - http://www.scopus.com/inward/record.url?scp=20144388180&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=20144388180&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:20144388180

SP - 11

EP - 25

T2 - Microfabricated Systems and MEMS VII - Proceedings of the International Symposium

Y2 - 3 October 2004 through 8 October 2004

ER -

Processing challenges in the fabrication of advanced MEMS

Abstract

Other

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this