Procedure for electron and ion lens optimization

M. Szilagyi, S. J. Yakowitz, M. O. Duff

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


This letter describes a computational technique for optimal control problems arising in the synthesis of electron and ion lenses. The method provides an effective search algorithm for electrostatic and/or magnetic imaging fields with minimum aberrations. An optimized electrostatic field distribution is given as an example of application.

Original languageEnglish (US)
Pages (from-to)7-9
Number of pages3
JournalApplied Physics Letters
Issue number1
StatePublished - 1984
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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