Problems in quantitation in x-ray photoelectron spectroscopy (xps): The use of data reduction techniques to obtain peak areas

B. L. Maschhoff; K. R. Zavadil; K. W. Nebesny; J. W. Fordemwalt; N. R. Armstrong

doi:10.1117/12.936607

Problems in quantitation in x-ray photoelectron spectroscopy (xps): The use of data reduction techniques to obtain peak areas

B. L. Maschhoff, K. R. Zavadil, K. W. Nebesny, J. W. Fordemwalt, N. R. Armstrong

Research output: Contribution to journal › Article › peer-review

Abstract

Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

Original language	English (US)
Pages (from-to)	112-123
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	690
DOIs	https://doi.org/10.1117/12.936607
State	Published - Aug 12 1986
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.936607

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abstract = "Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.",

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AU - Nebesny, K. W.

AU - Fordemwalt, J. W.

AU - Armstrong, N. R.

PY - 1986/8/12

Y1 - 1986/8/12

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AB - Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

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Problems in quantitation in x-ray photoelectron spectroscopy (xps): The use of data reduction techniques to obtain peak areas

Abstract

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