Printed sub-100 nm polymer-derived ceramic structures

Binh Duong, Palash Gangopadhyay, Josh Brent, Supapan Seraphin, Raouf O. Loutfy, Nasser Peyghambarian, Jayan Thomas

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.

Original languageEnglish (US)
Pages (from-to)3894-3899
Number of pages6
JournalACS Applied Materials and Interfaces
Volume5
Issue number9
DOIs
StatePublished - May 8 2013

Keywords

  • SNAP technique
  • nanoimprinting
  • nanostructured ceramics
  • polymer-derived ceramics
  • polyureasilazane
  • sub-100 nm ceramic structures

ASJC Scopus subject areas

  • General Materials Science

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