Preface—JSS focus issue on CMP for sub-10 nm technologies

Ara Philipossian, Jin Goo Park

Research output: Contribution to journal › Editorial › peer-review

5 Scopus citations

Original language	English (US)
Pages (from-to)	Y1
Journal	ECS Journal of Solid State Science and Technology
Volume	8
Issue number	5
DOIs	https://doi.org/10.1149/2.0301905jss
State	Published - 2019

ASJC Scopus subject areas

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