Preface

Koichiro Saga; Anthony J. Muscat; Paul Mertens; Takeshi Hattori; Jerzy Ruzyllo

Preface

Koichiro Saga
, Anthony J. Muscat
, Paul Mertens
, Takeshi Hattori
, Jerzy Ruzyllo

Chemical and Environmental Engineering

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	III
Journal	ECS Transactions
Volume	92
Issue number	2
State	Published - 2019
Event	16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019 - 236th ECS Meeting - Atlanta, United States Duration: Oct 13 2019 → Oct 17 2019

ASJC Scopus subject areas

General Engineering

Cite this

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title = "Preface",

author = "Koichiro Saga and Muscat, \{Anthony J.\} and Paul Mertens and Takeshi Hattori and Jerzy Ruzyllo",

year = "2019",

language = "English (US)",

volume = "92",

pages = "III",

journal = "ECS Transactions",

issn = "1938-6737",

publisher = "Electrochemical Society, Inc.",

number = "2",

note = "16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019 - 236th ECS Meeting ; Conference date: 13-10-2019 Through 17-10-2019",

}

TY - JOUR

T1 - Preface

AU - Saga, Koichiro

AU - Muscat, Anthony J.

AU - Mertens, Paul

AU - Hattori, Takeshi

AU - Ruzyllo, Jerzy

PY - 2019

Y1 - 2019

UR - https://www.scopus.com/pages/publications/85077133592

UR - https://www.scopus.com/pages/publications/85077133592#tab=citedBy

M3 - Editorial

AN - SCOPUS:85077133592

SN - 1938-6737

VL - 92

SP - III

JO - ECS Transactions

JF - ECS Transactions

IS - 2

T2 - 16th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2019 - 236th ECS Meeting

Y2 - 13 October 2019 through 17 October 2019

ER -

Preface

ASJC Scopus subject areas

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Cite this