Preface

Takeshi Hattori; Anthony J. Muscat; Koichiro Saga; Paul Mertens; Richard E. Novak; Jerzy Ruzyllo

Preface

Takeshi Hattori
, Anthony J. Muscat
, Koichiro Saga
, Paul Mertens
, Richard E. Novak
, Jerzy Ruzyllo

Chemical & Environmental Engr

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	iii
Journal	ECS Transactions
Volume	80
Issue number	2
State	Published - 2017
Event	15th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2017 - 232nd ECS Meeting - National Harbor, United States Duration: Oct 2 2017 → Oct 3 2017

ASJC Scopus subject areas

General Engineering

Cite this

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title = "Preface",

author = "Takeshi Hattori and Muscat, \{Anthony J.\} and Koichiro Saga and Paul Mertens and Novak, \{Richard E.\} and Jerzy Ruzyllo",

year = "2017",

language = "English (US)",

volume = "80",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-6737",

publisher = "Institute of Physics",

number = "2",

note = "15th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2017 - 232nd ECS Meeting ; Conference date: 02-10-2017 Through 03-10-2017",

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TY - JOUR

T1 - Preface

AU - Hattori, Takeshi

AU - Muscat, Anthony J.

AU - Saga, Koichiro

AU - Mertens, Paul

AU - Novak, Richard E.

AU - Ruzyllo, Jerzy

PY - 2017

Y1 - 2017

UR - https://www.scopus.com/pages/publications/85050026877

UR - https://www.scopus.com/pages/publications/85050026877#tab=citedBy

M3 - Editorial

AN - SCOPUS:85050026877

SN - 1938-6737

VL - 80

SP - iii

JO - ECS Transactions

JF - ECS Transactions

IS - 2

T2 - 15th International Symposium on Semiconductor Cleaning Science and Technology, SCST 2017 - 232nd ECS Meeting

Y2 - 2 October 2017 through 3 October 2017

ER -

Preface

ASJC Scopus subject areas

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Cite this