Precision large field scanning system for high numerical aperture lenses and application to femtosecond micromachining of ophthalmic materials

A precision, large stroke (nearly 1 cm) scanning system was designed, built, and calibrated for micromachining of ophthalmic materials including hydrogels and cornea (excised and in vivo). This system comprises a flexure stage with an attached objective on stacked vertical and horizontal translation stages. This paper outlines the design process leading to our most current version including the specifications that were used in the design and the drawbacks of other methods that were previously used. Initial measurements of the current version are also given. The current flexure was measured to have a 27 Hz natural frequency with no load.