Precision flexure stage utilizing parasitic motion

Research output: Contribution to conference › Paper › peer-review

Original language	English (US)
Pages	288-291
Number of pages	4
State	Published - 2012
Event	27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States Duration: Oct 21 2012 → Oct 26 2012

Conference	27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012
Country/Territory	United States
City	San Diego, CA
Period	10/21/12 → 10/26/12

ASJC Scopus subject areas

@conference{0878edf9f229409e92bc525067e6cf0a,

title = "Precision flexure stage utilizing parasitic motion",

author = "Burnham-Fay, \{Ethan D.\} and Richard Smith and Gillmer, \{Steve G.\} and Ellis, \{Jonathan D.\}",

year = "2012",

language = "English (US)",

pages = "288--291",

note = "27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 ; Conference date: 21-10-2012 Through 26-10-2012",

}

TY - CONF

T1 - Precision flexure stage utilizing parasitic motion

AU - Burnham-Fay, Ethan D.

AU - Smith, Richard

AU - Gillmer, Steve G.

AU - Ellis, Jonathan D.

PY - 2012

Y1 - 2012

UR - https://www.scopus.com/pages/publications/84884196948

UR - https://www.scopus.com/pages/publications/84884196948#tab=citedBy

M3 - Paper

AN - SCOPUS:84884196948

SP - 288

EP - 291

T2 - 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012

Y2 - 21 October 2012 through 26 October 2012

ER -