Abstract
A reactive filter for point-of-use (POU) purification can attain gas purity at the low-single-digit parts per trillion (ppt) level. A composite of intercalate reactive metal compounds forms an integral part of the existing fibrous filter matrix to create a POU purification surface. The reactive sites are located on the stainless steel filter medium to ensure contact and subsequent removal of homogeneous impurities.
| Original language | English (US) |
|---|---|
| Pages | 67-74 |
| Number of pages | 8 |
| Volume | 41 |
| No | 4 |
| Specialist publication | Solid State Technology |
| State | Published - Apr 1998 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry