PPT purification eliminates process variables

B. Gotlinsky, J. O'Sullivan, F. Shadman, M. Horikoshi, S. Babasaki

Research output: Contribution to specialist publicationArticle


A reactive filter for point-of-use (POU) purification can attain gas purity at the low-single-digit parts per trillion (ppt) level. A composite of intercalate reactive metal compounds forms an integral part of the existing fibrous filter matrix to create a POU purification surface. The reactive sites are located on the stainless steel filter medium to ensure contact and subsequent removal of homogeneous impurities.

Original languageEnglish (US)
Number of pages8
Specialist publicationSolid State Technology
StatePublished - Apr 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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