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Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces

Research output: Contribution to journalArticlepeer-review

Abstract

testing of spherical surfaces. The polarizing components are employed in the PDI to transform the polarization states of the test and reference beams, and a good fringe contrast can be realized by adjusting the relative intensities of interfering waves. The proposed system is compact and simple in structure, and it provides a feasible way for high-precision testing of spherical surfaces with low reflectivity. The theory of the interferometer is introduced in detail, along with the properties of optical components employed in the system, numerical analysis of systematic error, and the corresponding calibration procedure. Compared with the testing results of the ZYGO interferometer, a high accuracy with RMS value about 0:0025λ is achieved with the proposed interferometer. Finally, the error consideration in the experiment is discussed.

Original languageEnglish (US)
Pages (from-to)2342-2348
Number of pages7
JournalApplied optics
Volume50
Issue number16
DOIs
StatePublished - Jun 1 2011
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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