Abstract
Compared to conventional polycrystalline silicon (poly-Si), re-crystallized (RC) metal-induced laterally crystallized (MILC) poly-Si possesses improved mechanical and electrical properties. RC-MILC poly-Si piezoresistors exhibit ∼25% increase in gauge factor and ∼50% reduction in noise level compared to conventional poly-Si piezoresistors. RC-MILC poly-Si transistors exhibit performance approaching those built on single-crystal silicon. As a demonstration of the feasibility of using the RC-MILC poly-Si technology to realize non-trivial micro-systems, microphone integrating piezoresistive strain sensors and amplifiers has been designed, fabricated and characterized.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 548-551 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| State | Published - 2004 |
| Externally published | Yes |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: Jan 25 2004 → Jan 29 2004 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
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